Nanofabrication and Characterization of Electronics Laboratory

Class Overview

This course provides an introduction to nanofabrication technologies with emphasis on Si-based integrated circuits manufacturing as well as modern electronics based on GaN, 2D materials etc. The lab, primarily taught in the Cornell Teaching Cleanroom, includes basic fabrication steps of lithography, metallization, plasma etching and annealing. A series of devices will be fabricated: solar cells, MOS capacitors and transistors, 2D transistors, GaN HEMTs and LEDs.

Prerequisites: ECE 4360/MSE 5410, AEP 6620 or equivalents.
Key Topics: Lithography, Metallization, Plasma Etching, Annealing